Design and modeling of a 3-D micromachined accelerometer
نویسندگان
چکیده
This paper presents the operation principles, modeling methods, design, and fabrication considerations of a 3-D micromachined accelerometer. MEMS technology in this work combines small size, low cost and low power consumption to create a sensor that is suitable for wide usage in different applications such as automotive industry and inertial navigation systems.
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